1. Scientific Instrumentation and Analytical Equipment

• Mass Spectrometers and Ion Trap Systems: Used within the vacuum chambers of ion trap mass spectrometers as support structures for ion optics components. The zero porosity and ultra-low outgassing rate (virtually gas-free after baking) of Macor® ceramic maintain an ultra-high vacuum environment (ultimate vacuum level down to 10⁻⁴ Pa), ensuring precision ion transmission.

• Electron Microscopes (SEM/TEM): Support electron lenses or detector assemblies inside the microscope column. Its low thermal expansion coefficient (matching optical materials) and radiation resistance minimize thermal drift impacts on imaging.

2. Semiconductor and Electronics Manufacturing

• Lithography and Wafer Processing Equipment: Fix optical lenses or mirrors in the vacuum chambers of extreme ultraviolet (EUV) lithography machines. Macor’s dimensional stability and high-temperature resistance (≤900°C) safeguard optical path accuracy and prevent particulate contamination.

• Thin-Film Deposition Systems (e.g., PVD/CVD): Serve as heater insulation supports or substrate fixtures, resisting plasma corrosion while maintaining electrical insulation.

3. Aerospace and Defense Technology

• Satellite Optical Systems: Support lens assemblies for space telescopes and remote-sensing cameras. Macor’s lightweight properties, radiation resistance, and thermomechanical stability (adapting to extreme orbital temperature swings) ensure long-term operational stability of optical structures in space.

• Spacecraft Thermal Management Components: Used for thermal insulation window frames or electronic packaging mounts, blocking external heat transfer to onboard equipment.

4. Laser and High-Energy Physics Facilities

• High-Power Lasers: Secure mirrors or lenses in vacuum resonant cavities. Its low thermal deformation prevents laser beam misalignment, enhancing output stability.

• Particle Accelerators and Synchrotron Radiation Sources: Function as beam collimators or vacuum pipeline supports, providing both electrical insulation and radiation resistance.

5. New Energy and Advanced Materials R&D

• Nuclear Fusion Experimental Devices (e.g., Tokamak): Support optical diagnostic modules within vacuum vessels, withstanding high-temperature plasma environments and strong magnetic fields.

• Vacuum Heat Treatment Equipment: Hold temperature-measuring cameras or observation windows in high-temperature sintering furnaces (e.g., vacuum molybdenum strip furnaces), resisting heat without releasing contaminants.

Key Performance Attributes Enabling Applications

• Vacuum Compatibility: Extremely low outgassing rate (cold-state vacuum level: 6.67×10⁻⁴ Pa). Baking eliminates degassing, sustaining ultra-high vacuum conditions.

• Thermal Stability: Withstands 1000°C in air and operates stably up to 600°C in vacuum. Thermal expansion coefficient matches optical glass, reducing thermal stress.

Machinability

Despite being a ceramic, it allows precision CNC machining (accuracy: ±0.001 mm) for complex geometries.