Alumina ceramic rings Alias: Alumina ceramic guide wheel
Description：
1. High hardness, has good wear resistance.
2. Excellent insulation properties, as an electrical insulation material, widely used in electronic and electrical fields.
3. High temperature resistance, can maintain stable performance in high temperature environment, suitable for high-temperature applications.
4. Excellent chemical stability, good resistance to most chemicals, not easy to be corroded.
5. Good biocompatibility, suitable for medical field.
6. High precision, in the process of component processing, it can be formed and precision processed by various methods to meet different needs.
Product Photos:
Material Properties:
Alumina ceramics exhibit high hardness, abrasion resistance, high temperature resistance, corrosion resistance, low coefficient of thermal expansion (CTE), high electrical insulation and low high-frequency dielectric losses, compatibility with precision electronic environments. Its precision parts can be roughly divided into the following five categories according to their function and morphology：
1. Ring/Cylinder Components: including focus rings, chamber liners (e.g., plasma confinement & gas guidance);
2. Gas-Flow Guidance Components: including nozzles, diffusers (for the uniform distribution of process gases);
3. Structural/Fastening Components: including wafer stages, ceramic screws (for precision load-bearing & corrosion-resistant fixation);
4. Hand-claw Gaskets Components: including robot end effectors, insulating spacers (for wafer transfer & electrical isolation);
5. Integrated Modules: including electrostatic chucks (ESCs), vacuum chucks (for wafer clamping & thermal control).
Machining accuracy:
(1) Shaft: circularity 0.002 mm, concentricity 0.002mm, Roughness Ra0.1~0.02;
(2) Hole: minimum machining hole diameter 0.2 mm, depth up to 6 mm (parameters depend on specific materials);
(3) Groove (gap): a minimum of 0.1mm narrow grooves can be processed, as well as grooves of various shapes;
(4) Flat surface: the minimum thickness 0.1mm can be processed, parallelism 0.001mm, measurement tolerance 0.001mm, and roughness Ra0.1~0.02;
(5) Thread: Internal thread specifications machinable with M2 or above, and the thread accuracy up to GB-7H; External thread specification is not limited, and the accuracy GB-6g .
Welcome to Fudong Machinery Manufacturing (Hong Kong) Co., Ltd., we hope our products can suit your needs!
Founded in October 2006, Fudong Machinery is an enterprise specializing in the research and development, manufacturing and sales of non-standard industrial ceramics, cemented carbide (tungsten steel), and various metal and non-metal precision mechanical parts. After nearly 20 years of development, we have accumulated rich industry experience and trained a group of professional and technical personnel. It has a complete production process and quality management system, as well as a complete set of precision processing equipment and testing equipment, and has a good reputation in the industry.
At present, in the field of industrial ceramics, we specialize in the production of zirconia ceramic precision parts, alumina ceramic precision parts, silicon nitride ceramic precision parts, silicon carbide ceramic precision parts, machinable ceramic precision parts, microporous ceramic precision parts, aluminum nitride ceramic precision parts, cemented carbide (tungsten) precision parts, etc.
Applications:
Our products are widely used in precision machinery manufacturing, microelectronics, semiconductors, aerospace, biomedicine, optical fiber communication, testing and inspection, photovoltaic solar energy and other fields.
Semiconductor Manufacturing:
1. Etching Equipment: Plasma-resistant chamber liners, gas nozzles, focus rings (plasma distribution control);
2. Thin-Film Deposition: ESCs, heaters (wafer support & temperature control), showerheads (gas flow enhancement);
3. Chemical-mechanical polishing (CMP): Polishing plates, vacuum chucks (ultra-high flatness requirements).
Multi-Industry Applications:
1. Electronics / Power: LED ceramic substrates (CTE-matched to chips for solder-joint reliability), high-voltage insulators;
2. Mechanical / Energy: Wear-resistant bearings, seal rings (chemical pump valves), fuel cell corrosion-resistant components;
3. Biomedical: artificial joints, dental implants (biocompatibility + wear resistance);
4. Biomedical: Orthopedic implants / artificial joints, dental implants / dental abutments (biocompatibility + wear resistance);
5. Aerospace: Rocket sensor insulation, battery terminals, thermal protection for hypersonic vehicles.
Irreplaceable Roles
Alumina ceramics components are indispensable in semiconductor front-end equipment (etchers, deposition tools, ion implanters). Critical applications also include:
1. High-precision instruments: optical polishing platforms, precision cutting tools (dependent on their dimensional stability);
2. Extreme-Environment Equipment: High-temperature kiln furniture, nuclear reactor sensors (radiation resistance + electrical insulation);
3. Implantable Medical Devices: Long-term in vivo service components (no-rejection properties).
In short, Alumina precision ceramics dominate semiconductor, advanced manufacturing, and biomedical fields due to their balanced performance. Future advancements focus on: Hybridization (e.g., ZrO2 - toughening for enhanced fracture toughness), and Precision Machining Upgrades (complex micron-scale structures via precision engraving/milling processes).
Product customization:
Non-standard parts customization, due to different requirements such as product size, material details, processing accuracy, etc., resulting in different costs such as material costs, processing costs, packaging logistics, etc. Please be sure to contact customer service when ordering, provide as much part information (drawings or samples, use environment, etc.) and your requirements (quantity, delivery date, etc.) as much as possible, and we will submit you a specific plan that meets your parts requirements, as well as a preferential quotation.
